A 22-GHz push-push CMOS oscillator using micromachined inductors

To Po Wang, Ren Chieh Liu, Hong Yeh Chang, Liang Hung Lu, Huei Wang

Research output: Contribution to journalArticlepeer-review

27 Scopus citations


This letter presents a low phase noise 0.35-μm CMOS push-push oscillator utilizing micromachined inductors. This oscillator results in an improvement in phase noise compared with the previously published Si-based voltage-controlled oscillators (VCOs) around 20 GHz. With the high-Q inductors introduced by the micromachined structure, the oscillator achieves an oscillating frequency of 22.2 GHz while exhibiting an output power of - 7.5 dBm with a phase noise of -110.1 dBc/Hz at 1-MHz offset. This work also demonstrates the highest operating frequency among previously published Si-based VCOs using micromachined structures.

Original languageEnglish
Pages (from-to)859-861
Number of pages3
JournalIEEE Microwave and Wireless Components Letters
Issue number12
StatePublished - Dec 2005


  • Micromachined inductors
  • Voltage-controlled oscillators (VCOs)


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