3D displacement measurement with pico-meter resolution using single heterodyne grating interferometry

C. C. Hsu, J. Y. Lee, C. C. Wu, H. C. Shih

Research output: Contribution to journalArticlepeer-review

Abstract

The precision positioning device becomes significant requirement in scientific instruments used for the applications of nanotechnology for a few decades. To achieve the high resolution positioning, the sensing methods of displacement sensor become more important in positioning device. In this paper, a novel method is presented for measuring both in-plane/out-plane displacements with the single heterodyne grating interferometry (HGI). We demonstrated the ID, 2D, and 3D measurement results respectively and the smallest displacement can be detected was better than 6 pm. Furthermore, the nanometer resolution can be ensured within 20 /jm displacement. Hence, the in-plane/out-plane measurements with single apparatus can be realized by our method and might be a displacement sensor using in the motorized stage with suitable opto-mechanics structure minimization.

Original languageEnglish
Pages (from-to)283-286
Number of pages4
JournalKey Engineering Materials
Volume381-382
DOIs
StatePublished - 2008

Keywords

  • Diffracted grating
  • Heterodyne interferometry
  • Pico-meter resolution
  • Precision metrology
  • Three dimensional

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