2-DOF in-Plane Displacement Measurement by Wollaston Prism-based Interferometer

Hung Lin Hsieh; Ju Yi Lee; Bo Yen Sun; Gang Yu Fan

doi:10.1109/MESA.2018.8449196

2-DOF in-Plane Displacement Measurement by Wollaston Prism-based Interferometer

Hung Lin Hsieh, Ju Yi Lee, Bo Yen Sun, Gang Yu Fan

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

A Wollaston prism (WP)-based interferometer for two-degree-of-freedom (2-DOF) in-plane displacement measurement is developed in this study. The measurement system consists of a heterodyne light source and a high quality WP, and can provide 2-DOF in-plane displacement measurement with high accuracy and stability. Experiments demonstrate that the system has a resolution of 5 nm, and is resistant to outside disturbances as well as internal errors.

Original language	English
Title of host publication	2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Print)	9781538646434
DOIs	https://doi.org/10.1109/MESA.2018.8449196
State	Published - 27 Aug 2018
Event	14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2018 - Oulu, Finland Duration: 2 Jul 2018 → 4 Jul 2018

Publication series

Name	2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2018

Conference

Conference	14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2018
Country/Territory	Finland
City	Oulu
Period	2/07/18 → 4/07/18

Keywords

in-plane displacement
interferometer
Wollaston prism

Access to Document

10.1109/MESA.2018.8449196

Cite this

Hsieh, H. L., Lee, J. Y., Sun, B. Y., & Fan, G. Y. (2018). 2-DOF in-Plane Displacement Measurement by Wollaston Prism-based Interferometer. In 2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2018 Article 8449196 (2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2018). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MESA.2018.8449196

Hsieh, Hung Lin ; Lee, Ju Yi ; Sun, Bo Yen et al. / 2-DOF in-Plane Displacement Measurement by Wollaston Prism-based Interferometer. 2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2018. Institute of Electrical and Electronics Engineers Inc., 2018. (2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2018).

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abstract = "A Wollaston prism (WP)-based interferometer for two-degree-of-freedom (2-DOF) in-plane displacement measurement is developed in this study. The measurement system consists of a heterodyne light source and a high quality WP, and can provide 2-DOF in-plane displacement measurement with high accuracy and stability. Experiments demonstrate that the system has a resolution of 5 nm, and is resistant to outside disturbances as well as internal errors.",

keywords = "in-plane displacement, interferometer, Wollaston prism",

author = "Hsieh, {Hung Lin} and Lee, {Ju Yi} and Sun, {Bo Yen} and Fan, {Gang Yu}",

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Hsieh, HL, Lee, JY, Sun, BY & Fan, GY 2018, 2-DOF in-Plane Displacement Measurement by Wollaston Prism-based Interferometer. in 2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2018., 8449196, 2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2018, Institute of Electrical and Electronics Engineers Inc., 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2018, Oulu, Finland, 2/07/18. https://doi.org/10.1109/MESA.2018.8449196

2-DOF in-Plane Displacement Measurement by Wollaston Prism-based Interferometer. / Hsieh, Hung Lin; Lee, Ju Yi; Sun, Bo Yen et al.
2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2018. Institute of Electrical and Electronics Engineers Inc., 2018. 8449196 (2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2018).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - 2-DOF in-Plane Displacement Measurement by Wollaston Prism-based Interferometer

AU - Hsieh, Hung Lin

AU - Lee, Ju Yi

AU - Sun, Bo Yen

AU - Fan, Gang Yu

PY - 2018/8/27

Y1 - 2018/8/27

N2 - A Wollaston prism (WP)-based interferometer for two-degree-of-freedom (2-DOF) in-plane displacement measurement is developed in this study. The measurement system consists of a heterodyne light source and a high quality WP, and can provide 2-DOF in-plane displacement measurement with high accuracy and stability. Experiments demonstrate that the system has a resolution of 5 nm, and is resistant to outside disturbances as well as internal errors.

AB - A Wollaston prism (WP)-based interferometer for two-degree-of-freedom (2-DOF) in-plane displacement measurement is developed in this study. The measurement system consists of a heterodyne light source and a high quality WP, and can provide 2-DOF in-plane displacement measurement with high accuracy and stability. Experiments demonstrate that the system has a resolution of 5 nm, and is resistant to outside disturbances as well as internal errors.

KW - in-plane displacement

KW - interferometer

KW - Wollaston prism

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U2 - 10.1109/MESA.2018.8449196

DO - 10.1109/MESA.2018.8449196

M3 - 會議論文篇章

AN - SCOPUS:85053886802

SN - 9781538646434

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BT - 2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2018

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2018

Y2 - 2 July 2018 through 4 July 2018

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Hsieh HL, Lee JY, Sun BY, Fan GY. 2-DOF in-Plane Displacement Measurement by Wollaston Prism-based Interferometer. In 2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2018. Institute of Electrical and Electronics Engineers Inc. 2018. 8449196. (2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2018). doi: 10.1109/MESA.2018.8449196

2-DOF in-Plane Displacement Measurement by Wollaston Prism-based Interferometer

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