In this paper, we investigate the effects of growth temperature and growth rate on the formation of InAs/GaAs quantum dots (QDs) grown by metalorganic chemical vapor deposition. These QDs are formed with large InAs coverage (3.0MLs) and periodic growth interruption via the Stranski-Krastanow epitaxial growth mode. The photoluminescence (PL) spectra at 300K exhibit a red shift in peak wavelength by decreasing the InAs growth temperature from 540°C to 500°C. As the growth rate increases from 0.05 to 0.2ML/s at a growth temperature of 500°C, the PL linewidth decreases and the PL intensity increases. These results are related to the In clusters and uniformity of InAs/GaAs QDs, which are observed by scanning electron microscopy (SEM). Finally, the room-temperature PL spectrum of InAs/GaAs QDs directly capped with GaAs layer shows an emission wavelength at 1.35μm and a narrow linewidth of 30.8meV.
- A1. Photoluminescence
- A3. Metalorganic chemical vapor deposition
- A3. Quantum dots