10-Gbit/s on-chip optical interconnect module using silicon-based 45° micro-reflectors terminated polymer waveguides

Mao Yuan Zeng; Chin Ta Chen; Po Kuan Shen; Kai Liang; Chia Chi Chang; Hsu Liang Hsiao; Hsiao Chin Lan; Yun Chih Lee; Yo Shen Lin; Mount Learn Wu

10-Gbit/s on-chip optical interconnect module using silicon-based 45° micro-reflectors terminated polymer waveguides

Mao Yuan Zeng, Chin Ta Chen, Po Kuan Shen, Kai Liang, Chia Chi Chang, Hsu Liang Hsiao, Hsiao Chin Lan, Yun Chih Lee, Yo Shen Lin, Mount Learn Wu

Department of Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this paper, we propose a 10-Gbit/s optical interconnect module realized on the silicon optical bench (SiOB) using the silicon-based 45° micro-reflectors terminated the polymer waveguides. The silicon-based 45° micro-reflectors are fabricated on an orientation-defined (100) silicon substrate by using anisotropic chemical wet etching. The VCSEL and PD chips are assembled at the input and output ports of proposed module to demonstrate an out-of-plane optical coupling for the on-chip optical interconnects. The transmission efficiency of as high as -2.8 dB is experimentally obtained with a polymer-waveguide length of 0.5 cm. The clearly 10-Gbit/s electrical eye pattern is obtained and verifies that such a proposed module is suitable for the optical interconnects.

Original language	English
Title of host publication	Technical Digest of the 18th Microoptics Conference, MOC 2013
State	Published - 2013
Event	2013 18th Microoptics Conference, MOC 2013 - Tokyo, Japan Duration: 27 Oct 2013 → 30 Oct 2013

Publication series

Name	Technical Digest of the 18th Microoptics Conference, MOC 2013

Conference

Conference	2013 18th Microoptics Conference, MOC 2013
Country/Territory	Japan
City	Tokyo
Period	27/10/13 → 30/10/13

Cite this

Zeng, M. Y., Chen, C. T., Shen, P. K., Liang, K., Chang, C. C., Hsiao, H. L., Lan, H. C., Lee, Y. C., Lin, Y. S., & Wu, M. L. (2013). 10-Gbit/s on-chip optical interconnect module using silicon-based 45° micro-reflectors terminated polymer waveguides. In Technical Digest of the 18th Microoptics Conference, MOC 2013 Article 6715159 (Technical Digest of the 18th Microoptics Conference, MOC 2013).

@inproceedings{0daad4134874453c85106e620d782610,

title = "10-Gbit/s on-chip optical interconnect module using silicon-based 45° micro-reflectors terminated polymer waveguides",

abstract = "In this paper, we propose a 10-Gbit/s optical interconnect module realized on the silicon optical bench (SiOB) using the silicon-based 45° micro-reflectors terminated the polymer waveguides. The silicon-based 45° micro-reflectors are fabricated on an orientation-defined (100) silicon substrate by using anisotropic chemical wet etching. The VCSEL and PD chips are assembled at the input and output ports of proposed module to demonstrate an out-of-plane optical coupling for the on-chip optical interconnects. The transmission efficiency of as high as -2.8 dB is experimentally obtained with a polymer-waveguide length of 0.5 cm. The clearly 10-Gbit/s electrical eye pattern is obtained and verifies that such a proposed module is suitable for the optical interconnects.",

author = "Zeng, \{Mao Yuan\} and Chen, \{Chin Ta\} and Shen, \{Po Kuan\} and Kai Liang and Chang, \{Chia Chi\} and Hsiao, \{Hsu Liang\} and Lan, \{Hsiao Chin\} and Lee, \{Yun Chih\} and Lin, \{Yo Shen\} and Wu, \{Mount Learn\}",

year = "2013",

language = "???core.languages.en\_GB???",

isbn = "9784863483453",

series = "Technical Digest of the 18th Microoptics Conference, MOC 2013",

booktitle = "Technical Digest of the 18th Microoptics Conference, MOC 2013",

note = "2013 18th Microoptics Conference, MOC 2013 ; Conference date: 27-10-2013 Through 30-10-2013",

}

Zeng, MY, Chen, CT, Shen, PK, Liang, K, Chang, CC, Hsiao, HL, Lan, HC, Lee, YC, Lin, YS & Wu, ML 2013, 10-Gbit/s on-chip optical interconnect module using silicon-based 45° micro-reflectors terminated polymer waveguides. in Technical Digest of the 18th Microoptics Conference, MOC 2013., 6715159, Technical Digest of the 18th Microoptics Conference, MOC 2013, 2013 18th Microoptics Conference, MOC 2013, Tokyo, Japan, 27/10/13.

10-Gbit/s on-chip optical interconnect module using silicon-based 45° micro-reflectors terminated polymer waveguides. / Zeng, Mao Yuan; Chen, Chin Ta; Shen, Po Kuan et al.
Technical Digest of the 18th Microoptics Conference, MOC 2013. 2013. 6715159 (Technical Digest of the 18th Microoptics Conference, MOC 2013).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - 10-Gbit/s on-chip optical interconnect module using silicon-based 45° micro-reflectors terminated polymer waveguides

AU - Zeng, Mao Yuan

AU - Chen, Chin Ta

AU - Shen, Po Kuan

AU - Liang, Kai

AU - Chang, Chia Chi

AU - Hsiao, Hsu Liang

AU - Lan, Hsiao Chin

AU - Lee, Yun Chih

AU - Lin, Yo Shen

AU - Wu, Mount Learn

PY - 2013

Y1 - 2013

N2 - In this paper, we propose a 10-Gbit/s optical interconnect module realized on the silicon optical bench (SiOB) using the silicon-based 45° micro-reflectors terminated the polymer waveguides. The silicon-based 45° micro-reflectors are fabricated on an orientation-defined (100) silicon substrate by using anisotropic chemical wet etching. The VCSEL and PD chips are assembled at the input and output ports of proposed module to demonstrate an out-of-plane optical coupling for the on-chip optical interconnects. The transmission efficiency of as high as -2.8 dB is experimentally obtained with a polymer-waveguide length of 0.5 cm. The clearly 10-Gbit/s electrical eye pattern is obtained and verifies that such a proposed module is suitable for the optical interconnects.

AB - In this paper, we propose a 10-Gbit/s optical interconnect module realized on the silicon optical bench (SiOB) using the silicon-based 45° micro-reflectors terminated the polymer waveguides. The silicon-based 45° micro-reflectors are fabricated on an orientation-defined (100) silicon substrate by using anisotropic chemical wet etching. The VCSEL and PD chips are assembled at the input and output ports of proposed module to demonstrate an out-of-plane optical coupling for the on-chip optical interconnects. The transmission efficiency of as high as -2.8 dB is experimentally obtained with a polymer-waveguide length of 0.5 cm. The clearly 10-Gbit/s electrical eye pattern is obtained and verifies that such a proposed module is suitable for the optical interconnects.

UR - https://www.scopus.com/pages/publications/84894167016

M3 - 會議論文篇章

AN - SCOPUS:84894167016

SN - 9784863483453

T3 - Technical Digest of the 18th Microoptics Conference, MOC 2013

BT - Technical Digest of the 18th Microoptics Conference, MOC 2013

T2 - 2013 18th Microoptics Conference, MOC 2013

Y2 - 27 October 2013 through 30 October 2013

ER -

10-Gbit/s on-chip optical interconnect module using silicon-based 45° micro-reflectors terminated polymer waveguides

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