Study on Reducing the Stress of Multilayer Films on Plastic Substrate by Plasma Polymer Films

Project Details


Since the future products need light, thin, and flexible, the plastic substrate having light, thin, impactresistance and flexural strengths can replace the glass substrate used in a variety of optical elements is thecurrent trend. Particularly in the mobile phone camera, camera lens, projector lens, condenser lens,magnifying glass, lens, etc., has a lot to be replaced by an optical plastic. But the plastic substrate has manybad properties like cannot heat, poor adhesion, high thermal expansion coefficient, so it can’t depositmultilayer interference filter on the substrate, its application is limited. Besides, the flexible electronicsrequire the flexible substrates such as PET, PI, PC, also need to be able to deposit the multilayer interferencefilter to improve the optic property.The project will combine the electron gun evaporation system and plasma polymerization film in the samedevice, the plasma polymerization silicon oxide film as an adhesion and release stress layer between themultilayer interference filter and the plastic substrate. Using plasma polymerization process parameters toadjust the ratio of organic and inorganic in plasma polymerization silicon oxide film to match the stress ofmultilayer interference filter. It will be solving the problem of the current plastic substrate and be widely usedin the optical element. This project will develop the interferometer (phase shifting interferometry) to measurethe stress of the system. We will complete the low stress color filter( 12~16layer) on the plastic substrate byplasma polymerization silicon oxide film It will be pass the adhesion (ASTM D3359 test specifications5B)、environmental testing (IEC 60068-2-67, high temperature 85 ℃ and humidity 85% RH 100 hours) , thestress less than 0.2GPa and the average transmittance is more than 90%。
Effective start/end date1/08/1731/07/18

UN Sustainable Development Goals

In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This project contributes towards the following SDG(s):

  • SDG 2 - Zero Hunger
  • SDG 16 - Peace, Justice and Strong Institutions
  • SDG 17 - Partnerships for the Goals


  • plastic substrate
  • plasma polymerization
  • optical thin films
  • stress measurement
  • adhesion


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