Research on the Bipolar Plasma Deposition Technique with Rocking Substrate Stage for the Applications of 3d Curved Screen

This is a proposal entitled of “Research on the bipolar plasma deposition technique with rocking substratestage for the applications of 3D curved screen” regarding the improvement of the thickness uniformity of thethin film on the 3D curved screen. There are two methods to improve the thickness uniformity in thisproposal, which are to apply the bipolar plasma deposition technique and to place the rocking substrate stage.The bipolar plasma deposition technique based on the theory of plasma can increase the plasma density byusing tow phase-conjugate plasma guns. Different working gases and pressure can affect the plasma densityand change the thickness distribution of the film. A data base of the optical materials fabricated by bipolarplasma deposition will be built up for the antireflection coating design. Besides, a rocking substrate stage willalso be designed to improve the thickness uniformity of the thin film on the 3D curved screen. A depositionmodel will be set up to simulate the bipolar plasma deposition system with the rocking substrate stage toachieve an antireflection coating without chromatic difference on the 3D curved screen.