Research on Image Guided Micro Electroplating System(2/3)

The Localized Electro-Deposition method was proposed by Madden et. al. in 1996 to manufacture micro-columns. Hereafter, it has been attracting more and more researchers to work on the Localized Electro-Deposition topics. However, most researchers focused on single column growing and hence this method still faces large challenge to be applied on manufacturing lines. To increase the manufacturing speed, we proposed to work on the growing of arrayed columns. In the first year, we will utilize Comsol to analyze the electrical field around anodes and the columns inside the tank. Try to find the best pattern for the power supply for each column. Then, we will try to design and implement the experiment to verify the results from simulation. We will use CCD cameras to capture the image of the anodes and micro columns. Since bubbles always generated during the process, a software will be developed to eliminate of the effect of bubbles by calculating the entropy values of images. In the second year, we will work on the difference types of anodes and hope to find a best shape for the process. Also, we will work on the 3D shape for arrayed columns.Since the ion density inside the tank will affect the deposition rate, we will develop measurement device in the third year and try to utilize the information for the feedback control.