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Numerical Investigations of Impurity Transport Control during the Single Silicon Crystal Growth Process by Czochralski Method(2/2)
Chen, Jyh-Chen
(PI)
Department of Mechanical Engineering
Overview
Fingerprint
Research output
(1)
Project Details
Status
Finished
Effective start/end date
1/08/19
→
31/07/20
View all
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Keywords
Czochralski Crystal Growth
Silicon Crystal
Numerical Simulation
Fluid
Heat
and Mass Transport
Impurity Control
Fingerprint
Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.
Cusp Magnetic Field
Keyphrases
100%
Czochralski Silicon
Keyphrases
100%
Heat Flow
Keyphrases
100%
Silicon Melt
Keyphrases
100%
Heat Transport
Keyphrases
100%
Flow Transport
Keyphrases
100%
Oxygen Transport
Keyphrases
100%
Iso
Engineering
100%
Research output
Research output per year
2020
2020
2020
1
Article
Research output per year
Research output per year
Effects of crystal-crucible iso-rotation and a balanced/unbalanced cusp magnetic field on the heat, flow, and oxygen transport in a Czochralski silicon melt
Nguyen, T. H. T.,
Chen, J. C.
, Hu, C. & Chen, C. H.,
1 Feb 2020
,
In:
Journal of Crystal Growth.
531
, 125373.
Research output
:
Contribution to journal
›
Article
›
peer-review
Flow Transport
100%
Oxygen Transport
100%
Heat Flow
100%
Czochralski Silicon
100%
Silicon Melt
100%
12
Scopus citations