Numerical Investigations of Impurity Transport Control during the Single Silicon Crystal Growth Process by Czochralski Method(1/2)

Project Details

StatusFinished
Effective start/end date1/08/18 → 31/07/19

Keywords

  • Czochralski Crystal Growth
  • Silicon Crystal
  • Numerical Simulation
  • Fluid
  • Heat
  • and Mass Transport
  • Impurity Control