MOCVD關鍵零組件技術開發暨人才培育(2/3)

Project Details

StatusFinished
Effective start/end date1/01/15 → 31/03/16

Keywords

  • Chamber and rotating disk
  • In-situ measurement system
  • MOCVD
  • Talent cultivation
  • Heater
  • Injector diffusion system