High Uniform Coverage Optical Coating Technology for Micro Complex Structural Optical Components

Kuo, Chien-Cheng (PI)

Department of Optics and Photonics

Status	Finished
Effective start/end date	1/08/19 → 31/07/20

Keywords

Optical sensors
micro-complex structures
atomic layer deposition techniques
in-situ optical monitoring systems
microscopic spectral measurement system