Project Details
| Status | Finished |
|---|---|
| Effective start/end date | 1/06/18 → 31/05/19 |
Keywords
- semiconductor industry
- small-scale advanced process
- wet chemical
- wet etchants
- cleaning agents
- formula development
- local chemical manufacturers
- high-valued product
Formula Development of Wet Etchants and Cleaning Agents in Advanced Process of Semiconductor Industry( I )
- Tsao, Heng-Kwong (PI)