Formula Development of Wet Etchants and Cleaning Agents in Advanced Process of Semiconductor Industry( II )

曹, 恆光 (PI)

Department of Chemical and Materials Engineering

Status	Finished
Effective start/end date	1/06/19 → 31/05/20

Keywords

semiconductor industry
small-scale advanced process
wet chemical
wet etchants
cleaning agents
formula development
local chemical manufacturers
high-valued product