Fabrication of Double-Sided Graded-Refractive-Index Silicide/Si Nano-Heterostructure Arrays by Catalytic Etching and Their Properties Characterization

Project Details


One-dimensional Si and silicide nanostructures have great potential applications in electron field emission devices, solar cells, and light sensors because of their high aspect ratio and large specific surface area. A variety of techniques have been used to fabricate large-scale one-dimensional Si and silicide nanostructures. However, the controls of size, morphology, crystallographic orientation, and periodicity of these one-dimensional nanostructures produced are major challenges for practical applications. Therefore, in this project, particular emphasis will be focused on the fabrication of large-area, periodic arrays of vertically-aligned, size- and length-tunable one-dimensional single-crystal Si nanowires, developing novel processing techniques for the fabrication of needle-like, cone-like, and hollow tubular Si and silicide nanostructures, and systematically investigating the formation mechanisms, and the corresponding electron field emission and infrared sensing properties.The main research tasks of this proposed project include the following:1.Fabrication of large-area, vertically-aligned, cone-like and graded-refractive-index Si nanowire arrays by using the catalytic etching process.2.Developing the novel multiple catalytic etching process for the fabrication of one-dimensional single-crystalline Si nanotube arrays.3.Fabrication of one-dimensional silicide/Si nano-heterostructure arrays by using the tilted-angle evaporation technique and heat treatments.4.Developing the novel process technique for the fabrication of double-sided graded-refractive-index silicide/Si nano-heterostructure Schottky infrared detectors.
Effective start/end date1/08/1831/07/19

UN Sustainable Development Goals

In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This project contributes towards the following SDG(s):

  • SDG 7 - Affordable and Clean Energy
  • SDG 9 - Industry, Innovation, and Infrastructure
  • SDG 17 - Partnerships for the Goals


  • metal-catalyzed etching
  • nano-heterostructure
  • silicide nanotube
  • graded refractive index
  • infrared sensing


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