Development of Characterizing and Micromachining Technologies for Fabricating Quartz Crystal Unit( I )

Project Details


Based on the performance and dimension specs of a next quartz oscillator of partner corporation, TXC Corp., this proposal aims at developing precision analyzing and micro-machining technologies for miniaturizing quartz oscillators, which are deemed as core technologies for continuing miniaturizing frequency devices. First, according to the fundamental vibration theory for a thin quartz plate, this study will develop a mathematical model for the plate’s vibration characteristics and apply a commercially available finite element software to perform simulation analysis on the plate’s oscillation features. In the regard of machining the hard-to-machine thin quartz plates, two potential approaches, ECDM (electrochemical discharge machining) and ultrafast laser machining followed by wet chemical etching, are proposed for micro-drilling, narrow-slit cutting and thickness thinning processing. The ultrafast laser pulses are also employed to irradiate quartz plate for property modification, as a pre-processing step for the follow-up chemical etching processing. This secondary treatment is able to etch out the heat-affected zone from laser machining and enhance both dimension accuracy and quartz quality. In order to improve accuracy of simulation results, machine learning algorithm is utilized to establish prediction models such as the nonlinear parameter model, equivalent electrical parameter model and data-driven model. The obtained parameters also useful to simulation analysis. Finally, we propose to develop a quality prediction model for supervising and controlling machining qualities during the processing course. In addition, based on the genetic algorithm, a process parameter optimization model will also be established for the improvement of machining qualities. The results of this work are believed to be beneficial to TXC Corp., for enhancing TXC’s long-term core competitiveness in fabricating next-generations miniature frequency devices.
Effective start/end date1/06/2031/05/21

UN Sustainable Development Goals

In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This project contributes towards the following SDG(s):

  • SDG 9 - Industry, Innovation, and Infrastructure
  • SDG 11 - Sustainable Cities and Communities
  • SDG 17 - Partnerships for the Goals


  • Quartz oscillator
  • Quartz oscillation mode
  • Electrochemical discharge machining (ECDM)
  • Ultrashort pulsed laser
  • Laser material modification
  • Etching technology
  • Machine learning
  • Equivalent electrical parameter model
  • Data-driven model
  • Quality predictio


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