Development of a 3d Electromagnetic Energy Harvester Ii(1/2)

A three dimensional micro electromagnetic energy harvester using an injecting machine is proposed.By utilizing kinetic vibrational energy from environmental activities, the energy harvester can act as asubstitutive power source for low power consumption devices. Through the Faraday's law of induction, thechange of external magnetic flux can be converted to the induced electromotive force by the energy harvester,and thus generates electrical power. For fabricating 3D coils, we plan to use the 3D forming system that isbuilt previously, combining with a new UV curing subsystem, to carry out 3D coils with multiple degrees offreedoms. A proof mass will be added to the device, for better natural frequency matching and higher poweroutput. A low-temperature electroplating technique for magnets will be developed. Compared with typicalbulk magnets, the arrayed electroplated magnets have better thickness, shape, and location controllability.The proposed energy harvester is compatible with semiconductor processes. By integrating the device with areal time charging circuit, the proposed energy harvester is expected to supply efficient power for wearableelectronic devices.