This is a proposal entitled of “CAAC Sputtering Epi Technology for the Application of the Flexible Thin-film Devices” regarding the development of IGZO materials by high power impulse magnetron sputtering developed by the research team.
|Effective start/end date||1/08/22 → 31/07/23|
- Sputtering Epi Technology
- Flexible Thin-film Device
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