Caac Sputtering Epi Technology for the Application of the Flexible Thin-Film Devices(3/3)

Project Details

Description

This is a proposal entitled of “CAAC Sputtering Epi Technology for the Application of the Flexible Thin-film Devices” regarding the development of IGZO materials by high power impulse magnetron sputtering developed by the research team.
StatusActive
Effective start/end date1/08/2231/07/23

Keywords

  • Sputtering Epi Technology
  • Flexible Thin-film Device

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