Research output per year
Research output per year
Project Details
Description
This is a proposal entitled of “CAAC Sputtering Epi Technology for the Application of the Flexible Thin-film Devices” regarding the development of IGZO materials by high power impulse magnetron sputtering developed by the research team.
| Status | Finished |
|---|---|
| Effective start/end date | 1/08/21 → 31/07/22 |
UN Sustainable Development Goals
In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This project contributes towards the following SDG(s):
Keywords
- Sputtering Epi Technology
- Flexible Thin-film Device
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Research output
- 1 Article
-
Effect of substrate biasing on the epitaxial growth and structural properties of rf magnetron sputtered germanium buffer layer on silicon
Zeng, G. S., Liu, C. L. & Chen, S. H., Sep 2021, In: Coatings. 11, 9, 1060.Research output: Contribution to journal › Article › peer-review
Open Access2 Scopus citations