Keyphrases
HiPIMS
100%
Waveguide Resonators
100%
Room Temperature
100%
Gallium Nitride
100%
Gallium Nitride Film
60%
Critical Coupling
20%
Metal-organic Chemical Vapor Deposition (MOCVD)
20%
High Extinction Ratio
20%
CMOS Technology
20%
Photonics
20%
Quantum Photonics
20%
High Flatness
20%
Waveguide
20%
Low Thermal Budget
20%
Silicon-based Substrate
20%
Optical Communications
20%
Silicon Substrate
20%
Sputtered Films
20%
High Deposition Rate
20%
Gap Size
20%
Amorphous Substrate
20%
Buried Oxide
20%
Fabrication Methods
20%
Nonlinear Photonics
20%
Physics
Resonator
100%
Room Temperature
100%
Magnetron Sputtering
100%
Nitride
100%
Waveguide
100%
Photonics
37%
Metalorganic Chemical Vapor Deposition
12%
Flatness
12%
Optical Communication
12%
Q Factor
12%
Material Science
Waveguide
100%
Gallium Nitride
100%
High Power Impulse Magnetron Sputtering
100%
Resonator
100%
Film
50%
Silicon
25%
Oxide Compound
12%
Metal-Organic Chemical Vapor Deposition
12%