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在重摻雜N型半導體或高純度矽晶材料中轉換介面壁壘型態使電洞流為主控電流,以進行表面陽極氧化合成奈米結構(1/3)
Lee, Tien-Hsi
(PI)
Department of Mechanical Engineering
Overview
Fingerprint
Research output
(1)
Project Details
Status
Finished
Effective start/end date
1/08/21
→
31/07/22
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Fingerprint
Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.
Low Temperature
Keyphrases
100%
Nitrides
Keyphrases
100%
Rough Surface
Keyphrases
100%
Capillary
Keyphrases
100%
Wafer Bonding
Keyphrases
100%
Aluminum Nitride Ceramics
Keyphrases
100%
Oxidation Reaction
Material Science
100%
Aluminum Nitride
Material Science
100%
Research output
Research output per year
2022
2022
2022
1
Article
Research output per year
Research output per year
Low-temperature rough-surface wafer bonding with aluminum nitride ceramics implemented by capillary and oxidation actions
Nien, S. M., Ruan, J. L., Kuo, Y. K. &
Lee, B. T. H.
,
15 Mar 2022
,
In:
Ceramics International.
48
,
6
,
p. 8766-8772
7 p.
Research output
:
Contribution to journal
›
Article
›
peer-review
Low Temperature
100%
Rough Surface
100%
Nitrides
100%
Wafer Bonding
100%
Capillary
100%
6
Scopus citations