以即時製程監控關鍵技術進行電漿輔助化學氣相沉積設備開發及製程最佳化

李, 建階 (PI)

Optical Sciences Center

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2017
Structural and electrical investigations of a-Si:H(i) and a-Si:H(n+) stacked layers for improving the interface and passivation qualities
Hsieh, Y. L., Lee, C. C., Lu, C. C., Fuh, Y. K., Chang, J. Y., Lee, J. Y. & Li, T. T., 1 Jul 2017, In: Journal of Photonics for Energy. 7, 3, 035503.
Research output: Contribution to journal › Article › peer-review
3 Scopus citations