Keyphrases
Heterodyne Interferometry
69%
Heterodyning
55%
Phase Difference
48%
Heterodyne Interferometer
36%
Displacement Measurement
34%
Surface Plasmon Resonance
34%
Measurement Resolution
32%
Common Path
29%
Angular Displacement Measurement
26%
Interferometer
24%
Refractive Index
24%
Laser Encoder
21%
Refractive Index Measurement
21%
Optical Heterodyne
20%
Grating
20%
Phase Variation
20%
P-polarization
19%
S-polarization
19%
High-resolution
18%
Light Beam
17%
Measurement Techniques
16%
Grating Interferometry
16%
Phase Quadrature
15%
Wafer
15%
Common Optical Path
15%
Optical Configuration
15%
Light Source
14%
Phase-shifting Method
14%
Measurement System
14%
Wafer Positioning
14%
Total Internal Reflection
12%
Easy Operation
12%
Sub-nanometer Resolution
12%
In-plane Displacement
11%
Birefringence
11%
Three-dimensional (3D)
11%
High Stability
10%
Chiral Media
10%
Light Mixing
10%
Nanopositioning
10%
Standing Wave
10%
In-plane Displacement Measurement
10%
Measurement Basis
10%
Lock-in Amplifier
10%
Interferometric Techniques
10%
Optical Setup
10%
Positioning System
9%
Polarization State
8%
Tunable Laser Diode
8%
Phase Shift
8%
Engineering
Interferometry
100%
Displacement Measurement
92%
Experimental Result
49%
Phase Difference
42%
Surface Plasmon
37%
Measurement Resolution
33%
Refractive Index
32%
Optical Path
30%
Nanometre
26%
Angular Displacement
21%
In-Plane Displacement
19%
Light Beam
17%
High Resolution
15%
Two Dimensional
14%
Light Source
13%
Measurement System
12%
Total Internal Reflection
12%
Reflected Light
11%
Standing Wave
10%
Frequency Noise
10%
Amplifier
10%
Environmental Disturbance
9%
Laser Beam
9%
Polarization State
8%
Three-Dimensional Models
8%
Test Sample
8%
Nonlinearity
8%
Straightness
7%
Scattered Light
7%
Incident Angle
7%
Angles of Rotation
7%
Displacement Sensor
7%
Two Degree of Freedom
7%
Rotation Angle
7%
Thin Film Growth
7%
Fresnel Equation
7%
Range Measurement
6%
Phase Shift
6%
Optical Phase
6%
Moir Fringe
6%
Robot
5%
Runout
5%
Camera Parameter
5%
Nanometer Range
5%
Refractometer
5%
Glucose Sensor
5%
Biosensor
5%
Retarders
5%
Phase Stability
5%
Glucose Concentration
5%