Keyphrases
Heterodyne Interferometry
66%
Heterodyning
52%
Phase Difference
47%
Heterodyne Interferometer
34%
Displacement Measurement
32%
Surface Plasmon Resonance
32%
Measurement Resolution
30%
Common Path
28%
Angular Displacement Measurement
25%
Interferometer
24%
Refractive Index
23%
Laser Encoder
20%
Refractive Index Measurement
20%
Optical Heterodyne
19%
Grating
19%
Phase Variation
19%
P-polarization
18%
S-polarization
18%
High-resolution
17%
Light Beam
16%
Measurement Techniques
15%
Grating Interferometry
15%
Phase Quadrature
14%
Wafer
14%
Common Optical Path
14%
Optical Configuration
14%
Light Source
14%
Phase-shifting Method
14%
Measurement System
13%
Wafer Positioning
13%
Total Internal Reflection
11%
Easy Operation
11%
Sub-nanometer Resolution
11%
In-plane Displacement
11%
Birefringence
11%
Three-dimensional (3D)
10%
High Stability
10%
Chiral Media
10%
Light Mixing
10%
Nanopositioning
10%
Standing Wave
10%
In-plane Displacement Measurement
10%
Measurement Basis
10%
Lock-in Amplifier
10%
Interferometric Techniques
9%
Polarization Interferometry
9%
Optical Setup
9%
Positioning System
9%
Polarization State
8%
Tunable Laser Diode
8%
Engineering
Interferometry
100%
Displacement Measurement
87%
Experimental Result
47%
Phase Difference
41%
Surface Plasmon
35%
Measurement Resolution
31%
Refractive Index
30%
Refractivity
30%
Optical Path
28%
Nanometre
24%
Angular Displacement
23%
In-Plane Displacement
18%
Light Beams
16%
High Resolution
14%
Two Dimensional
14%
Light Source
13%
Measurement System
12%
Total Internal Reflection
11%
Reflected Light
11%
Standing Wave
10%
Frequency Noise
10%
Amplifier
10%
Environmental Disturbance
9%
Laser Beams
8%
Polarization State
8%
Three-Dimensional Models
8%
Test Sample
8%
Nonlinearity
7%
Straightness
7%
Incident Angle
7%
Scattered Light
7%
Angles of Rotation
6%
Displacement Sensor
6%
Two Degree of Freedom
6%
Rotation Angle
6%
Thin Film Growth
6%
Fresnel Equation
6%
Range Measurement
6%
Optical Phase
5%
Phase Shift
5%
Moir Fringe
5%
Runout
5%
Camera Parameter
5%
Nanometer Range
5%
Glucose Sensor
5%
Biosensor
5%
Retarders
5%
Phase Stability
5%
Glucose Concentration
5%
Transfer Process
5%
